Auger Electron Spectroscopy
Auger Electron SpectroscopyAES surface analysiselemental composition analysiselectron spectroscopy techniquesurface science instrumentation
Auger Electron Spectroscopy (AES) is a powerful surface-sensitive analytical technique used to determine the elemental composition and chemical state of the topmost atomic layers of a material. This method is invaluable in materials science, semiconductor research, and failure analysis for probing surface chemistry with high spatial resolution.